Study on a Two-Dimensional Scanning Micro-Mirror and Its Application in a MOEMS Target Detector
نویسندگان
چکیده
A two-dimensional (2D) scanning micro-mirror for target detection and measurement has been developed. This new micro-mirror is used in a MOEMS target detector to replace the conventional scanning detector. The micro-mirror is fabricated by MEMS process and actuated by a piezoelectric actuator. To achieve large deflection angles, the micro-mirror is excited in the resonance modes. It has two degrees of freedom and changes the direction of the emitted laser beam for a regional 2D scanning. For the deflection angles measurement, piezoresistors are integrated in the micro-mirror and the deflection angles of each direction can be detected independently and precisely. Based on the scanning micro-mirror and the phase-shift ranging technology, a MOEMS target detector has been developed in a size of 90 mm × 35 mm × 50 mm. The experiment shows that the target can be detected in the scanning field and the relative range and orientation can be measured by the MOEMS target detector. For the target distance up to 3 m with a field of view about 20° × 20°, the measurement resolution is about 10.2 cm in range, 0.15° in the horizontal direction and 0.22° in the vertical direction for orientation.
منابع مشابه
Imaging with two-axis micromirrors
We demonstrate a means of creating a digital image by using a two axis tilt micromirror to scan a scene. For each different orientation we extract a single grayscale value from the mirror and combine them to form a single composite image. This allows one to choose the distribution of the samples, and so in principle a variable resolution image could be created. We demonstrate this ability to co...
متن کاملDesign, Analysis, Fabrication, and Characterization of the Micro Optical Scanning Devices
Presently, we successfully integrated multi-depth DRIE etching, two-poly MUMPs, and bulk releasing to accomplish superior poly-Si micro-optical systems. The stiffness of the devices was significantly increased using the trench-refilled rib structure, so that the radius of curvature (ROC) of the 2μm thick mirror even reached 150mm. In addition, the space between the devices and the substrate was...
متن کاملA Modified Proportional Navigation Guidance for Accurate Target Hitting
When a detector sensitive to the target plume IR seeker is used for tracking airborne targets, the seeker tends to follow the target hot point which is a point farther away from the target exhaust and its fuselage. In order to increase the missile effectiveness, it is necessary to modify the guidance law by adding a lead bias command. The resulting guidance is known as target adaptive guidance ...
متن کاملThree Dimensional Localization of an Unknown Target Using Two Heterogeneous Sensors
Heterogeneous wireless sensor networks consist of some different types of sensor nodes deployed in a particular area. Different sensor types can measure different quantity of a source and using the combination of different measurement techniques, the minimum number of necessary sensors is reduced in localization problems. In this paper, we focus on the single source localization in a heterogene...
متن کاملOn Numerical Investigation of Non-dimensional Constant Representing the Occurrence of Secondary Peaks in the Nusselt Distribution Curves
The Study of heat transfer augmentation in micro scale and electronic packaging systems are some of the paramount areas of the impending universe. In such systems the cooling of the heat sinks are generally achieved through the impingement of air jet. Assuming the air jet to be continues & incompressible fluid, the heat dissipation rate over the target surface seems to either uniform or well ch...
متن کامل